Open AccessStudy of luminescent properties of Al-Si-N films
Author(s) -
Б. П. Гриценко,
V. F. Shtan’ko,
С. А. Степанов,
G. Zh. Nogaibekova,
В. П. Сергеев
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/5/052003
Subject(s) - luminescence , excited state , photoluminescence , materials science , excitation , spectral line , optoelectronics , radiation , photoluminescence excitation , atomic physics , optics , physics , quantum mechanics , astronomy