Open AccessInfluence of nitrogen concentration on structure, composition and properties of nitride coatings deposited by vacuum arc plasma-assisted method
Author(s) -
О. В. Крысина,
В. В. Шугуров,
N. A. Prokopenko,
Е. А. Петрикова
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/3/032075
Subject(s) - plasma , coating , nitride , cathode , materials science , molybdenum , nitrogen , arc (geometry) , plasma arc welding , gas composition , vacuum arc , metallurgy , analytical chemistry (journal) , composite material , chemistry , layer (electronics) , environmental chemistry , thermodynamics , physics , organic chemistry , quantum mechanics , geometry , mathematics , welding