Open AccessA study of conditions of Al2O3 coatings deposition by the anodic reactive evaporation of aluminum
Author(s) -
A. S. Kamenetskikh,
Н. М. Гаврилов,
V. I. Solomonov,
Yu. S. Surkov,
Alexey Ershov,
P. V. Tretnikov
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/3/032073
Subject(s) - anode , materials science , cathode , evaporation , nanocrystalline material , aluminium , deposition (geology) , current density , analytical chemistry (journal) , dissociation (chemistry) , ion , composite material , chemistry , nanotechnology , electrode , thermodynamics , paleontology , physics , organic chemistry , quantum mechanics , chromatography , sediment , biology