Open AccessProperties of ta-C coatings prepared by pulsed cathodic arc source at various distances
Author(s) -
Sergey Chepkasov,
Alexander Zolkin,
D.G. Piliptsou,
Е.В. Гладких,
К. С. Кравчук
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/3/032066
Subject(s) - nanoindentation , materials science , raman spectroscopy , substrate (aquarium) , cathodic arc deposition , silicon , composite material , amorphous carbon , amorphous solid , carbon arc welding , analytical chemistry (journal) , cathodic protection , metallurgy , crystallography , submerged arc welding , chemistry , optics , welding , anode , electrode , arc welding , oceanography , physics , chromatography , geology