Open AccessPeculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets
Author(s) -
G.A. Bleykher,
Dmitrii V. Sidelev,
V.A. Grudinin,
В. П. Кривобоков,
A.V. Yuryeva
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/3/032065
Subject(s) - sputter deposition , nanoindentation , materials science , scanning electron microscope , deposition (geology) , sputtering , substrate (aquarium) , metallurgy , cavity magnetron , physical vapor deposition , diffraction , composite material , thin film , nanotechnology , optics , paleontology , sediment , geology , oceanography , physics , biology