Open AccessModification of stainless steel by low-energy focused nitrogen ion beam
Author(s) -
I. V. Lopatin,
Yu. Kh. Akhmadeev,
О. В. Крысина,
N. A. Prokopenko,
Е. А. Петрикова,
A. I. Ryabchikov,
D. O. Sivin,
О. С. Корнева
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/3/032041
Subject(s) - materials science , electrode , cathode , beam (structure) , plasma , nitrogen , ion beam , nitride , electric arc , layer (electronics) , arc (geometry) , ion , ion beam deposition , nitriding , focused ion beam , composite material , metallurgy , optics , chemistry , physics , geometry , mathematics , organic chemistry , quantum mechanics