Open AccessDiagnostics of argon cluster ion beam for materials treatment
Author(s) -
N. G. Korobeishchikov,
I. V. Nikolaev,
M. A. Roenko
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/3/032016
Subject(s) - ion , atomic physics , cluster (spacecraft) , mass spectrum , argon , ion beam , ionization , beam (structure) , ion beam deposition , electron ionization , spectral line , time of flight , mass spectrometry , ion source , chemistry , materials science , physics , optics , computer science , organic chemistry , chromatography , astronomy , programming language