Open AccessLow-energy ions source of plane geometry on the basis of plasma-beam discharge with a slot cathode
Author(s) -
Н. А. Ашурбеков,
К. О. Иминов,
Г. Ш. Шахсинов,
А. К. Рамазанов
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/2/022036
Subject(s) - anode , cathode , neon , materials science , plasma , torr , atomic physics , tungsten , cathode ray , plasma channel , optics , electron , argon , electrode , chemistry , laser , physics , quantum mechanics , metallurgy , thermodynamics