Open AccessThe formation of a plasma anode in a Penning discharge cell combined with a planar magnetron
Author(s) -
P. P. Kiziridi,
G. E. Ozur,
L. A. Zyul’kova
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1115/2/022003
Subject(s) - anode , plasma , atomic physics , cathode , argon , cavity magnetron , materials science , current density , current (fluid) , explosive material , cathode ray , electron , chemistry , physics , sputtering , thin film , electrode , nuclear physics , nanotechnology , organic chemistry , quantum mechanics , thermodynamics