Open AccessThin film elements design: software and possibilities of femtosecond laser techniques
Author(s) -
R. V. Chkalov,
K. S. Khorkov,
Д. А. Кочуев,
В. Г. Прокошев,
N. N. Davydov
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1109/1/012029
Subject(s) - femtosecond , laser , materials science , microelectronics , thin film , surface micromachining , substrate (aquarium) , pulse duration , laser ablation , optics , optoelectronics , wavelength , fabrication , nanotechnology , physics , medicine , oceanography , alternative medicine , pathology , geology