Open AccessSynthesis of silicon carbonitride films by activation gas flow in laser power optical pulsating discharge plasma
Author(s) -
V. N. Demin,
T. P. Smirnova,
V. O. Borisov,
G. N. Grachev,
А. Л. Смирнов,
M. N. Khomyakov
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1105/1/012131
Subject(s) - argon , silicon , benzene , deposition (geology) , coating , volumetric flow rate , materials science , plasma , chemical vapor deposition , thin film , analytical chemistry (journal) , chemical engineering , nanotechnology , chemistry , optoelectronics , organic chemistry , paleontology , physics , quantum mechanics , sediment , engineering , biology