Open AccessChemical deposition process for coatings: the problems of mass and heat transfer
Author(s) -
И. К. Игуменов,
Vladimir V. Lukashov
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1105/1/012130
Subject(s) - sublimation (psychology) , mass transfer , materials science , heat transfer , inert gas , thermodynamics , inert , chemical vapor deposition , mass flow rate , thermal conductivity , helium , thermal , convection , analytical chemistry (journal) , chemistry , composite material , nanotechnology , psychology , physics , organic chemistry , psychotherapist , chromatography