Open AccessLow-frequency ferromagnetic enhanced inductively coupled plasma for plasma-assisted nitriding
Author(s) -
M. V. Isupov,
V. A. Pinaev
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1105/1/012119
Subject(s) - nitriding , inductively coupled plasma , materials science , plasma , tin , analytical chemistry (journal) , tetragonal crystal system , nitrogen , ion , ferrite (magnet) , metallurgy , chemistry , phase (matter) , composite material , physics , organic chemistry , layer (electronics) , quantum mechanics , chromatography