Open AccessModified method of direct laser writing radially symmetric structures
Author(s) -
S. V. Ganchevskaya,
Р. В. Скиданов,
O. A. Titaev
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1096/1/012013
Subject(s) - photoresist , planar , optics , materials science , laser beams , laser , beam (structure) , physics , nanotechnology , computer science , computer graphics (images) , layer (electronics)