Open AccessGlancing angle deposition of optical coatings: results of the full-atomistic simulation
Author(s) -
F. V. Grigoriev,
V. B. Sulimov,
Alexander V. Tikhonravov
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1092/1/012046
Subject(s) - deposition (geology) , thin film , materials science , refractive index , silicon , silicon dioxide , optics , combustion chemical vapor deposition , carbon film , optoelectronics , nanotechnology , composite material , physics , biology , paleontology , sediment