Open AccessFabrication and Characterization of Cu-doped ZnO Films Using RF Reactive Magnetron Sputtering
Author(s) -
A. P. M. Yusof,
Z. Hassan
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1083/1/012062
Subject(s) - materials science , wurtzite crystal structure , van der pauw method , thin film , sputter deposition , band gap , doping , transmittance , sputtering , optoelectronics , alloy , semiconductor , hall effect , analytical chemistry (journal) , electrical resistivity and conductivity , nanotechnology , zinc , metallurgy , chemistry , engineering , chromatography , electrical engineering