Open AccessPerformance investigation of NIM’s small force device based on electrostatic force principle
Author(s) -
Gang Hu,
Jile Jiang,
Zhimin Zhang
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1065/4/042028
Subject(s) - lever , electrostatic force microscope , hinge , stiffness , mechanism (biology) , electrode , capacitance , voltage , force balance , materials science , mechanics , physics , electrical engineering , classical mechanics , composite material , cantilever , engineering , quantum mechanics