Open AccessProgress of white light interference profilometry by using atomically-smooth mirror
Author(s) -
Э. В. Сысоев,
Р. В. Куликов,
I. A. Vykhristyuk,
Alexander Aseev
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1065/3/032015
Subject(s) - correlogram , profilometer , optics , interference (communication) , interferometry , monatomic ion , resolution (logic) , white light interferometry , materials science , silicon , surface (topology) , monochromatic color , physics , optoelectronics , surface finish , mathematics , computer science , channel (broadcasting) , geometry , telecommunications , statistics , quantum mechanics , artificial intelligence , composite material