Open AccessCalibration of 3 DoF microstages with XYΘ sensors
Author(s) -
Jae Wan Kim,
Jong-Ahn Kim,
Sung Hoon Eom
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1065/15/152001
Subject(s) - backlash , calibration , position (finance) , bearing (navigation) , control theory (sociology) , table (database) , movement (music) , computer science , geodesy , control (management) , physics , acoustics , artificial intelligence , geology , finance , economics , data mining , quantum mechanics