Open AccessMeasurement of sticking probability and sputtering yield of Au by low-energy mass selected ion beams with a quartz crystal microbalance
Author(s) -
Kazumasa Ikuse,
Satoru Yoshimura,
Masato Kiuchi,
Kiyohiro Hine,
Satoshi Hamaguchi
Publication year - 2008
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/106/1/012016
Subject(s) - quartz crystal microbalance , sputtering , quartz , yield (engineering) , crystal (programming language) , ion , materials science , sticking probability , analytical chemistry (journal) , atomic physics , chemistry , thin film , composite material , nanotechnology , physics , adsorption , chromatography , desorption , organic chemistry , computer science , programming language