Open AccessPlasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma –A Brief Introduction
Author(s) -
Soo Ren How,
Nafarizal Nayan,
Jais Lias,
Mohd Khairul Ahmad,
Mohd Zainizan Sahdan,
M. H. Mamat,
Mohamad Rusop Mahmood,
Ali Aldalbahi
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1027/1/012005
Subject(s) - argon , plasma , sputtering , sputter deposition , emission spectrum , spectroscopy , materials science , cavity magnetron , spectrometer , analytical chemistry (journal) , ionization , plasma diagnostics , atomic emission spectroscopy , light emission , atomic physics , chemistry , inductively coupled plasma , thin film , optoelectronics , optics , physics , ion , spectral line , nanotechnology , quantum mechanics , astronomy , organic chemistry , chromatography