Open AccessInfluence of the N2gas flow on optical and structural properties of reactively sputtered ZrN films
Author(s) -
Sebastian Schleussner,
Tobias Törndahl,
Marika Edoff
Publication year - 2008
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/100/8/082016
Subject(s) - materials science , flow (mathematics) , sputtering , metallurgy , nanotechnology , thin film , mechanics , physics