Open AccessCleaning efficiency of carbon films by oxygen plasmas in the presence of metallic getters
Author(s) -
F.L. Tabarés,
J. A. Ferreira,
D. Tafalla,
Isabel Tanarro,
Vı́ctor J. Herrero,
Isabel Méndez,
C. GómezAleixandre,
J. M. Albella
Publication year - 2008
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/100/6/062025
Subject(s) - getter , glow discharge , materials science , analytical chemistry (journal) , metal , carbon fibers , deposition (geology) , plasma , carbon film , titanium , chemical engineering , metallurgy , chemistry , thin film , composite material , nanotechnology , optoelectronics , composite number , chromatography , paleontology , physics , quantum mechanics , sediment , engineering , biology