Fabrication and modeling of recessed traces for silicon-based neural microelectrodes
Author(s) -
Nicholas F. Nolta,
Pejman Ghelich,
Alpaslan Ersöz,
Martin Han
Publication year - 2020
Publication title -
journal of neural engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.594
H-Index - 111
eISSN - 1741-2560
pISSN - 1741-2552
DOI - 10.1088/1741-2552/abb9bd
Subject(s) - fabrication , microelectrode , materials science , flatness (cosmology) , electrical conductor , silicon , nanotechnology , computer science , optoelectronics , electrode , composite material , chemistry , medicine , physics , alternative medicine , pathology , cosmology , quantum mechanics
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