Open AccessMulti-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon
Author(s) -
David Alexander Schulenberg,
Ihor Korolov,
Zoltán Donkó,
Aranka Derzsi,
Julian Schulze
Publication year - 2021
Publication title -
plasma sources science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 108
eISSN - 1361-6595
pISSN - 0963-0252
DOI - 10.1088/1361-6595/ac2222
Subject(s) - particle in cell , electron temperature , argon , plasma , atomic physics , ion , electron , computational physics , monte carlo method , chemistry , electrode , electron density , materials science , physics , statistics , mathematics , organic chemistry , quantum mechanics