Open AccessExperimental investigations of the magnetic asymmetry effect in capacitively coupled radio frequency plasmas
Author(s) -
Moritz Oberberg,
J Kallähn,
Peter Awakowicz,
Julian Schulze
Publication year - 2018
Publication title -
plasma sources science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 108
eISSN - 1361-6595
pISSN - 0963-0252
DOI - 10.1088/1361-6595/aae199
Subject(s) - magnetic field , asymmetry , plasma , atomic physics , electrode , biasing , particle in cell , symmetry (geometry) , dc bias , voltage , chemistry , physics , quantum mechanics , geometry , mathematics
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