Open AccessOn the E-H transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular oxygen
Author(s) -
Thomas Wegner,
C. Küllig,
Jürgen Meichsner
Publication year - 2017
Publication title -
plasma sources science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 108
eISSN - 1361-6595
pISSN - 0963-0252
DOI - 10.1088/1361-6595/26/2/025006
Subject(s) - atomic physics , chemistry , metastability , ground state , electronegativity , electron density , plasma , ionization , electron , ion , electron temperature , inductively coupled plasma , langmuir probe , plasma diagnostics , physics , organic chemistry , quantum mechanics