Open AccessInverse metal-assisted chemical etching of germanium with gold and hydrogen peroxide
Author(s) -
David Lidsky,
John M. Cain,
Troy A. Hutchins-Delgado,
TzuMing Lu
Publication year - 2022
Publication title -
nanotechnology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.926
H-Index - 203
eISSN - 1361-6528
pISSN - 0957-4484
DOI - 10.1088/1361-6528/ac810c
Subject(s) - materials science , germanium , etching (microfabrication) , isotropic etching , hydrogen peroxide , semiconductor , dry etching , metal , analytical chemistry (journal) , nanotechnology , optoelectronics , silicon , metallurgy , chemistry , layer (electronics) , chromatography , organic chemistry
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