Open AccessNanoaperture fabrication in ultra-smooth single-grain gold films with helium ion beam lithography
Author(s) -
Chenyi Zhang,
Jinxin Li,
Alex Belianinov,
Zhao Ma,
C. Kyle Renshaw,
Ryan M. Gelfand
Publication year - 2020
Publication title -
nanotechnology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.926
H-Index - 203
eISSN - 1361-6528
pISSN - 0957-4484
DOI - 10.1088/1361-6528/abae99
Subject(s) - materials science , wafer , fabrication , field ion microscope , lithography , focused ion beam , optoelectronics , nanotechnology , ion beam , optical microscope , surface finish , helium , optics , ion , scanning electron microscope , beam (structure) , composite material , atomic physics , alternative medicine , quantum mechanics , medicine , pathology , physics
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