Open AccessA MEMS nanoindenter with an integrated AFM cantilever gripper for nanomechanical characterization of compliant materials
Author(s) -
Zhi Li,
Shuang Gao,
Uwe Brand,
Karla Hiller,
Helmut Wolff
Publication year - 2020
Publication title -
nanotechnology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.926
H-Index - 203
eISSN - 1361-6528
pISSN - 0957-4484
DOI - 10.1088/1361-6528/ab88ed
Subject(s) - nanoindenter , materials science , microelectromechanical systems , cantilever , nanoindentation , characterization (materials science) , nanotechnology , atomic force microscopy , optoelectronics , composite material