Open AccessQuantitative laser diagnostics on trimethylindium pyrolysis and photolysis for functional nanoparticle growth
Author(s) -
Per Samuelsson,
Martin H. Magnusson,
Knut Deppert,
Marcus Aldén,
Zhongshan Li
Publication year - 2022
Publication title -
measurement science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.48
H-Index - 136
eISSN - 1361-6501
pISSN - 0957-0233
DOI - 10.1088/1361-6501/ac51a4
Subject(s) - trimethylindium , indium , photodissociation , materials science , dissociation (chemistry) , laser , photochemistry , ultraviolet , analytical chemistry (journal) , optoelectronics , nanotechnology , epitaxy , chemistry , metalorganic vapour phase epitaxy , optics , organic chemistry , physics , layer (electronics)
We report on an optical investigation of the pyrolysis and photolysis of trimethylindium (TMIn) as a typical metalorganic precursor for functional nanowire growth, aiming at an in-depth understanding of the governing chemistry and optimization of aerosol-based (aerotaxy) and epitaxial growth processes. A flow reactor with special consideration given to optical access was built to provide the chemical environment for in situ optical measurements on the pyrolysis and photolysis of TMIn. By probing a resonant transition of the indium atom, high-resolution laser absorption and laser-induced fluorescence spectroscopy were applied to obtain the atomic indium concentration at different chosen conditions in a spatially and temporally resolved manner. The results indicate that quantitative measurements of indium atoms under growth conditions are feasible. A 213 nm pulsed laser was employed to induce photolytic dissociation of TMIn vapor under chosen conditions. The photolytic dissociation of TMIn vapor with an ultraviolet laser turns out to be a promising method in generating substantial chemical effects, indicated by the generation of visible clouds of indium particles, and high concentrations of indium atoms far beyond the pyrolytically generated amount.