Open AccessReal-time HCl gas detection at parts-per-billion level concentrations utilising a diode laser and a bismuth-doped fibre amplifier
Author(s) -
Hildén Panu,
Timo Rajamäki,
Thomas Fordell,
Jarkko Makkonen,
Sergey Alyshev,
Alexander Kharakhordin,
Sergei Firstov
Publication year - 2020
Publication title -
measurement science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.48
H-Index - 136
eISSN - 1361-6501
pISSN - 0957-0233
DOI - 10.1088/1361-6501/abd651
Subject(s) - analyser , materials science , amplifier , diode , bismuth , laser , analytical chemistry (journal) , optics , cleanroom , doping , optoelectronics , chemistry , nanotechnology , physics , chromatography , metallurgy , cmos
HCl measurements in a cleanroom environment are carried out using a cavity ring-down analyser in order to get an estimate of the HCl concentrations that can be expected to be present in semiconductor manufacturing. HCl is a reactive gas and the materials used for gas sampling and transportation have a significant effect on the measurement response time; hence, data on HCl adsorption to different materials is also provided. Finally, a light source operating at 1742 nm that can be used for HCl detection in a multi-gas analyser based on multipass photo-acoustic spectroscopy is presented. Preliminary results indicate that sub-ppb detection levels are achievable using this approach even for HCl.
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