Open AccessReal-time HCl gas detection at parts-per-billion level concentrations utilising a diode laser and a bismuth-doped fibre amplifier
Author(s) -
Hildén Panu,
Rajamaki Timo,
Thomas Fordell,
Jarkko Makkonen,
Sergey Alyshev,
А. В. Харахордин,
S. V. Firstov
Publication year - 2021
Publication title -
measurement science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.48
H-Index - 136
eISSN - 1361-6501
pISSN - 0957-0233
DOI - 10.1088/1361-6501/abd651
Subject(s) - analyser , materials science , amplifier , laser , diode , optics , bismuth , cleanroom , light source , doping , analytical chemistry (journal) , optoelectronics , nanotechnology , chemistry , physics , chromatography , metallurgy , cmos
HCl measurements in a cleanroom environment are carried out using a cavity ring-down analyser in order to get an estimate of the HCl concentrations that can be expected to be present in semiconductor manufacturing. HCl is a reactive gas and the materials used for gas sampling and transportation have a significant effect on the measurement response time; hence, data on HCl adsorption to different materials is also provided. Finally, a light source operating at 1742 nm that can be used for HCl detection in a multi-gas analyser based on multipass photo-acoustic spectroscopy is presented. Preliminary results indicate that sub-ppb detection levels are achievable using this approach even for HCl.