Open AccessDesign and performance of a test rig for evaluation of nanopositioning stages
Author(s) -
Andrew Yacoot,
Petr Klapetek,
Miroslav Valtr,
Petr Grolich,
Herve Dongmo,
G. M. Lazzerini,
Angus Bridges
Publication year - 2019
Publication title -
measurement science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.48
H-Index - 136
eISSN - 1361-6501
pISSN - 0957-0233
DOI - 10.1088/1361-6501/aafd03
Subject(s) - traceability , metrology , computer science , software , lithography , systems engineering , photolithography , manufacturing engineering , engineering drawing , materials science , engineering , nanotechnology , software engineering , optics , physics , optoelectronics , programming language
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