Open AccessA hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology
Author(s) -
Christopher W. Jones,
Daniel O’Connor
Publication year - 2018
Publication title -
measurement science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.48
H-Index - 136
eISSN - 1361-6501
pISSN - 0957-0233
DOI - 10.1088/1361-6501/aababd
Subject(s) - metrology , dimensional metrology , throughput , computer science , critical dimension , routing (electronic design automation) , electronics , system of measurement , field (mathematics) , engineering , embedded system , optics , electrical engineering , physics , telecommunications , mathematics , pure mathematics , wireless , astronomy