Open AccessMetrological characterization methods for confocal chromatic line sensors and optical topography sensors
Author(s) -
Jeremias Seppä,
Karri Niemelä,
Antti Lassila
Publication year - 2018
Publication title -
measurement science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.48
H-Index - 136
eISSN - 1361-6501
pISSN - 0957-0233
DOI - 10.1088/1361-6501/aaad2b
Subject(s) - confocal , metrology , chromatic scale , optics , characterization (materials science) , calibration , line (geometry) , materials science , computer science , physics , mathematics , geometry , quantum mechanics