Open AccessSynthesis and properties of CSxFythin films deposited by reactive magnetron sputtering in an Ar/SF6discharge
Author(s) -
ChungChuan Lai,
Cecilia Goyenola,
Esteban Broitman,
LarsÅke Näslund,
Hans Högberg,
Lars Hultman,
G.K. Gueorguiev,
Johanna Rosén
Publication year - 2017
Publication title -
journal of physics condensed matter
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.908
H-Index - 228
eISSN - 1361-648X
pISSN - 0953-8984
DOI - 10.1088/1361-648x/aa67d2
Subject(s) - thin film , x ray photoelectron spectroscopy , analytical chemistry (journal) , sputtering , nanoindentation , sputter deposition , materials science , cavity magnetron , crystallography , chemistry , chemical engineering , nanotechnology , organic chemistry , metallurgy , engineering
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