Open AccessTuning plasma parameters to control reactive species fluxes to substrates in the context of plasma catalysis
Author(s) -
Jingkai Jiang,
Peter Bruggeman
Publication year - 2021
Publication title -
journal of physics d applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.857
H-Index - 198
eISSN - 1361-6463
pISSN - 0022-3727
DOI - 10.1088/1361-6463/abe89a
Subject(s) - duty cycle , plasma , context (archaeology) , chemistry , nonthermal plasma , substrate (aquarium) , catalysis , ion , chemical physics , flux (metallurgy) , analytical chemistry (journal) , volumetric flow rate , environmental chemistry , thermodynamics , physics , organic chemistry , power (physics) , paleontology , oceanography , quantum mechanics , biology , geology
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