Open AccessTarget materials for efficient plasma-based extreme ultraviolet sources in the range of 6 to 8 nm
Author(s) -
Alexander von Wezyk,
К. А. Андрианов,
Thomas Wilhein,
K. Bergmann
Publication year - 2019
Publication title -
journal of physics. d, applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.857
H-Index - 198
eISSN - 1361-6463
pISSN - 0022-3727
DOI - 10.1088/1361-6463/ab4317
Subject(s) - gadolinium , materials science , extreme ultraviolet , ultraviolet , plasma , alloy , terbium , magnesium , laser , wavelength , brightness , atomic physics , analytical chemistry (journal) , optoelectronics , optics , chemistry , physics , luminescence , metallurgy , nuclear physics , chromatography
In a comparative study the extreme ultraviolet (XUV) emission of laser-produced plasmas (LPP) of gadolinium (Gd), terbium (Tb), aluminum (Al), magnesium (Mg) and a magnesium–copper–gadolinium alloy (Mg 65 –Cu 25 –Gd 10 ) targets is investigated in order to benchmark the emission potential at a wavelength of around 6.7 nm. Compared to the Gd/Tb targets, the advantage of the alloy is a reduced melting point of T m < 500 °C which leads to the option of a liquid or droplet target system as is usually used for a regenerative target concept. Theoretical considerations are presented to compare the emission potential of the four targets in direct comparison. Experimental results of the LPP are discussed with respect to the 6. x nm inband energy, which are consistent with the theoretical considerations. It is shown that the line radiators Al and Mg seem to be suitable emitters with comparable brightness to Gd- or Tb-based sources. The measured conversion efficiency of the Mg 65 Cu 25 Gd 10 target reaches 80% of that of the pure Gd LPP although the Gd fraction is only 2% (atom percent).