Open AccessInfluence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution
Author(s) -
Siegfried Zöhrer,
André Anders,
Robert Franz
Publication year - 2018
Publication title -
journal of physics. d, applied physics
Language(s) - English
Resource type - Journals
eISSN - 1361-6463
pISSN - 0022-3727
DOI - 10.1088/1361-6463/aaeecc
Subject(s) - cathode , ion , plasma , atomic physics , cathodic protection , cathodic arc deposition , argon , chemistry , inert gas , vacuum arc , analytical chemistry (journal) , materials science , electrochemistry , electrode , nuclear physics , physics , organic chemistry , chromatography