Open AccessSensing performance of room temperature operated MEMS gas sensor for ppb level detection of hydrogen sulfide: a review
Author(s) -
Gulshan Verma,
Ankur Gupta
Publication year - 2022
Publication title -
journal of micromechanics and microengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/ac82f8
Subject(s) - hydrogen sulfide , microelectromechanical systems , hydrogen , hydrogen sulfide sensor , nanotechnology , oxide , hydrogen sulphide , sulfide , materials science , chemistry , metallurgy , organic chemistry , sulfur
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