Open AccessOptimization of plotter printing for sub-terahertz metallic metasurfaces fabrication on ultra-thin substrate
Author(s) -
Cyprien Brulon,
Baptiste Fix,
Arthur Salmon,
Patrick Bouchon
Publication year - 2022
Publication title -
journal of micromechanics and microengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/ac5b97
Subject(s) - terahertz radiation , fabrication , materials science , substrate (aquarium) , lithography , optoelectronics , photolithography , thin film , 3d printing , metamaterial , optics , nanotechnology , medicine , oceanography , alternative medicine , pathology , geology , physics , composite material
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