Open AccessShape deviations of DLW microstructures in dependency of fabrication parameters
Author(s) -
Sven Fritzsche,
Ievgenia Topolniak,
Matthias Weise,
Heinz Stürm
Publication year - 2021
Publication title -
journal of micromechanics and microengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/ac2a14
Subject(s) - fabrication , laser , materials science , laser power scaling , optics , physics , medicine , alternative medicine , pathology