Shoulder fillet effects in strength distributions of microelectromechanical system components
Author(s) -
Frank W. DelRio,
Brad Boyce,
Jake T. Benzing,
Lawrence H. Friedman,
Robert F. Cook
Publication year - 2020
Publication title -
journal of micromechanics and microengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/abbf89
Subject(s) - fillet (mechanics) , microelectromechanical systems , structural engineering , materials science , mechanical engineering , engineering , nanotechnology
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