Open AccessA maskless etching technique for fabrication of 3D MEMS structures in SOI CMOS devices
Author(s) -
Mohtashim Mansoor,
Ibraheem Haneef,
Andrea De Luca,
John D. Coull,
Florin Udrea
Publication year - 2018
Publication title -
journal of micromechanics and microengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/aabe0d
Subject(s) - microelectromechanical systems , silicon on insulator , fabrication , etching (microfabrication) , materials science , optoelectronics , cmos , nanotechnology , silicon , medicine , alternative medicine , pathology , layer (electronics)
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