Optimization of the batch production of silicon fiber-top MEMS devices | Zendy

J. H. Rector | Zendy; M. Slaman | Zendy; R. Verdoold | Zendy; Davide Iannuzzi | Zendy; Steven V. Beekmans | Zendy

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Optimization of the batch production of silicon fiber-top MEMS devices

Author(s) -

J. H. Rector,

M. Slaman,

R. Verdoold,

Davide Iannuzzi,

Steven V. Beekmans

Publication year - 2017

Publication title -

journal of micromechanics and microengineering

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.494

H-Index - 132

eISSN - 1361-6439

pISSN - 0960-1317

DOI - 10.1088/1361-6439/aa8c4e

Subject(s) - microelectromechanical systems , fabrication , yield (engineering) , reliability (semiconductor) , fiber , cantilever , batch production , optical fiber , silicon , materials science , process (computing) , production (economics) , process engineering , electronic engineering , nanotechnology , computer science , engineering , optoelectronics , mechanical engineering , telecommunications , composite material , physics , economics , macroeconomics , operating system , medicine , power (physics) , alternative medicine , pathology , quantum mechanics

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