Open AccessTemperature dependency of silicon structures for magnetic field gradient sensing
Author(s) -
Alexander Dabsch,
C. Rosenberg,
Michael Stifter,
Franz Keplinger
Publication year - 2017
Publication title -
journal of micromechanics and microengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/aa7d28
Subject(s) - temperature gradient , microelectromechanical systems , magnetic field , lorentz force , finite element method , materials science , resistor , sensitivity (control systems) , thermoelectric effect , silicon , temperature measurement , electromagnetic coil , optoelectronics , physics , electronic engineering , electrical engineering , engineering , quantum mechanics , voltage , thermodynamics
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