Open AccessMEMS cantilever based magnetic field gradient sensor
Author(s) -
Alexander Dabsch,
C. Rosenberg,
Michael Stifter,
Franz Keplinger
Publication year - 2017
Publication title -
journal of micromechanics and microengineering
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/aa654f
Subject(s) - cantilever , microelectromechanical systems , magnetic field , materials science , field (mathematics) , acoustics , optoelectronics , physics , composite material , mathematics , quantum mechanics , pure mathematics
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