Open AccessFabrication and electrical characterization of partially metallized vias fabricated by inkjet
Author(s) -
Behnam Khorramdel,
Matti Mäntysalo
Publication year - 2016
Publication title -
journal of micromechanics and microengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/0960-1317/26/4/045017
Subject(s) - materials science , fabrication , microelectromechanical systems , wafer , electrical conductor , inkwell , inkjet printing , nanotechnology , chemical vapor deposition , characterization (materials science) , optoelectronics , nanoparticle , silicon , composite material , medicine , alternative medicine , pathology