Open AccessFlow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition
Author(s) -
Kai Kolari,
Tahvo Havia,
Ingmar Stuns,
Klas Hjort
Publication year - 2014
Publication title -
journal of micromechanics and microengineering
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/0960-1317/24/8/084003
Subject(s) - silicon , materials science , phase transition , membrane , flow (mathematics) , optoelectronics , chemistry , mechanics , physics , thermodynamics , biochemistry