Open AccessNanoscale tomographic reconstruction of the subsurface mechanical properties of low-khigh-aspect ratio patterns
Author(s) -
Gheorghe Stan,
E. Mays,
Hui Jae Yoo,
Sean W. King
Publication year - 2016
Publication title -
nanotechnology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.926
H-Index - 203
eISSN - 1361-6528
pISSN - 0957-4484
DOI - 10.1088/0957-4484/27/48/485706
Subject(s) - materials science , stiffness , nanoscopic scale , aspect ratio (aeronautics) , modulus , elastic modulus , resolution (logic) , tomographic reconstruction , image resolution , contact area , young's modulus , optics , tomography , composite material , nanotechnology , physics , artificial intelligence , computer science
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom